Agouram, S., Terwagne, G. & Bodart, F., 2013, Metallic oxynitride thin films by reactive sputtering and related deposition methods: processes, properties and applications. Bentham, EB. (ed.). p. 133-16230 p.
Research output: Contribution in Book/Catalog/Report/Conference proceeding › Chapter (peer-reviewed) › peer-review