• 841 Citations
  • 17 h-Index
1983 …2020

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Chapter (peer-reviewed)
2013

Growth and Characterization of Chromium Oxynitride Thin Films Prepared Using Reactive Unbalanced Magnetron Sputtering in Presence of Air as Reactive Gas

Agouram, S., Terwagne, G. & Bodart, F., 2013, Metallic oxynitride thin films by reactive sputtering and related deposition methods: processes, properties and applications. Bentham, EB. (ed.). p. 133-162 30 p.

Research output: Contribution in Book/Catalog/Report/Conference proceedingChapter (peer-reviewed)