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Research Output 2018 2018

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2018

Blocking germanium diffusion inside silicon dioxide using a co-implanted silicon barrier

Barba, D., Wang, C., Nélis, A., Terwagne, G. & Rosei, F., 28 Apr 2018, In : Journal of Applied Physics. 123, 16, 6 p., 161540.

Research output: Contribution to journalArticle

germanium
nanocrystals
silicon dioxide
silicon
outgassing