Workshop on physical characterisation of high-k dielectrics

Houssiau, L. (Contributor)

Activity: Participating in or organising an event typesParticipation in conference

Description

Characterisation of high-k dielectrics with ToF-SIMS, communication orale. Co-auteur : T. Conard.
Period17 Dec 2003
Event typeSymposium
LocationImec, Louvain, Belgium