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Understanding the magnetron PECVD of a-C:H film with acetylene precursor from PICMC simulations
Lucas, S.
(Speaker)
Namur Nanosafety Center
Namur Institute of Structured Matter
Namur Research Institute for Life Sciences
Unite de recherche en analyses par reactions nucleaires
Activity
:
Talk or presentation types
›
Oral presentation
Period
23 Sept 2019
→
27 Sept 2019
Event title
Plathinium 2019: Plasma Thin Film International Union Meeting
Event type
Conference
Location
Antibes, France
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Degree of Recognition
International