Pulsed reactive sputtering of chromium nitride from 12.5 to 87.5 % of duty cycle, at 62.5 to 5000Hz

Haye, E. (Speaker), Lucas, S. (Speaker), Pireaux, J. (Speaker)

Activity: Talk or presentation typesOral presentation

Period4 Dec 2017 - 6 Dec 2017
Event typeConference
LocationPlzen, Czech Republic