AVS 50th International Symposium

Activity: Participating in or organising an event typesParticipation in conference

Description

Presentation orale: <High-k Al2O3-HfO2 layers for CMOS applications studied by XPS and ToF-SIMS > ; R.G. Vitchev, L. Houssiau and J.J. Pireaux
Period2 Nov 20035 Nov 2003
Event typeConference
LocationBaltimore MD, Etats-UnisShow on map