AVS 50th International Symposium

Vitchev, R. (Contributor)

Activity: Participating in or organising an event typesParticipation in conference

Description

The Effect of Surface Preparation and Post Growth Annealing on the Thickness and Composition of Thin Films Grown on Silicon Wafers Using ALD and MOCVD. Co-auteurs : R. Champaneria, P. Mack, R.G. White, J. Wolstenholme et Th. Conard.
Period2 Nov 2003 - 7 Nov 2003
Event typeConference
LocationBaltimore MD, Etats-Unis